LEYBOLD BALZERS ARISTO 500S Products

  • LEYBOLD HERAEUS: Z650

    Details
    ID#:
    27258
    Category:
    Sputtering Systems
    Sputtering system equipped with load lock / exit chamber with Leybold Trivac D65B prevacuum pump, Leybold Turbovac 1000 turbo molecular pump, and RF plasma cleaning. Process chamber A with Alcatel 2063 prevacuum pump and Pfeiffer TMH1001P turbodrag pump (TMH is as good as new), 3 x new PK 200 sputtering cathodes positions, RF and DC sputtering power supply, (combined with process chamber B), Balzers QMG064 massaspectrometer; Process chamber B with Leybold Trivac D65B prevacuum pump, Leybold Turbovac 1000 turbo molecular pump, 2 x new PK 200 sputtering cathodes positions, 1x substrate heating position, RF and DC sputtering power supply, (combined with process chamber A), RF bias, Balzers QMG064 massaspectrometer, can be retrofitted to your specs.
  • BALZERS: BAK 760

    Details
    ID#:
    9071169
    Category:
    Evaporators
    Evaporator | E-beam and substrate heating | | Compact High Vacuum Coater | (1) Rotary drive motor | (1) Substrate holder 4" | (1) High-Vac plate valve DN 500 mm | (1) Fore-vacuum valve | (1) Bypass valve | (1) Vent valve for N2 | (1) Chevron | Vacuum measurement cells: Leybold 1 | (2) TPR280 foreline and high vac pump | PKR251 Chamber | | Vacuum Pumps | Medium pump stand | EDWARDS GV80 EH 500 Dry pump/Roots blower 250 m3/h | DUO + ROOTS, with test | Hi vacuum pump | Diff 500 A with baffle: Balzers | | Water battery for cold water distribution | Cold-water 20°C | Flow meter on each line | | EMO | High safety devices | Door monitor | | Balzers High Voltage Cabinet EHV110 | EKS 110 / ETS 110 rack | HV EHV110 | (1) E-Gun: Balzers ESQ 110 | Shutter | EDE 110 Servomotor | EHS 110 Filament transformers | Source with 4-hole crucible | | Control Cabinet | PLC Siemens S7 | Visualisation Siemens WinCC flexible | Windows PC 17- 19” TFT | Programmable start | Automatic/manual vacuum control | Disengagable interlocks | Display of the vacuum values | Visualisation of the system status | Data log | Leak rate test function | Password controlled access – free setting of user | Groups (for example engineer, service, operator aso.) | | Deposition Controller | Inficon Maxtek, XTC/2 or eq. | (1) Single quartz sensor - connected to single crystal oscillator | Vacuum feedthrough | | Options available: | Protection shields | Heater | E-Beam (new) | Thermal evaporator, 3.5 kW | Glow discharge | Ion gun: K&R | | CE Marked | 3 x 400 VAC, 63 A, 3 Ph+N+NE, 50 Hz.
  • LEYBOLD HERAEUS: UL 500

    Details
    ID#:
    9124183
    Category:
    Pumps
    Helium leak detector. | Warm up time less than 5 minutes | Quantitative leak testing from inlet pressures starting at 100 mBar (75 torr) | Fast automatic range switching | Automatic zero correction | Max. measurable he leak rate: 10 atm cc/sec | Min. measurable leak rate: 2 x 10E10 atm cc/sec | Leybold 16B & leybold D4 pumps 100-240V, 50/60Hz.
  • OERLIKON / BALZERS: Univex multichamber

    Details
    ID#:
    9140170
    Category:
    Sputtering Systems
    Vintage:
    2013 
    Multichamber sputtering system | Brooks front-end loader | Sputtering edge chamber | (2) Deposition chambers | (4) Targets per chamber | Heated chucks | Chamber lids have auto lift | Run expentance wafers | Transfer module w/ brooks magna tran robot | P/N : 201600-01-0029 | CoolVac 2000-CL/CP 7.25 cryopump | (1) Process module (PM1) | AE RF Navio 3155401-002A matching network | CoolVac 800-CL-V/CP-7/25 cryopump | (1) Process module (PM2) | CoolVac 1500-CL-V/CP-7/25 cryopump | TurboVac 1000C turbopump | (1) Process module (PM3) | AE RF Navio 3155401-002A matching network | CoolVac 1500-CL-V/CP-7/25 cryopump | TurboVac 1000C turbopump | (1) support electronics/gas cabinet | (4) VAT PM-5 adaptive pressure controller | (2) Trumpf-huttinger elektronik truplasma DC 4001 generators | (4) Trumpf-huttinger elektronik truplasma DC 3002 generators | (2) Leybold turbodrive TD20 classic turbopump controllers | (2) Advanced energy MDX-500 RF generator | (2) Advanced energy Cesar RF generator | (3) Advanced energy DC pinnacle plus RF generator | 600W 13.56MHz | (2) Leybold coolvac power supply | (33) mass flow controllers, 400V, 142A, 80kW | (5) Leybold SC30D dry scroll vacuum pump | (2) Oerlikon coolPak 6200H helium compressor cat# 840000V6201 | (1) Eurocold ACW-LP 12 AL OR SL (15/27 R407C 230/1/50 chiller) | Numerous spare parts | P/N : S170848 | 2013 vintage.
  • LEYBOLD HERAEUS: Syrus 1105

    Details
    ID#:
    9161139
    Category:
    Photoresist
    Vacuum coating system | Includes: | (7) Pocket electron beam guns | (2) Resistance evaporation sources | Mark II ion source | INFICON XTC Quartz monitor | BALZER / PFEIFFER diffusion pump with baffle | LEYBOLD Rotary pump with blower | PFC 1100 Polycold | XTC / 2 Vacuum instrument | Dome, sector plates and rings | Set up for ophthalmic AR and mirror coatings | Automatic process control with LEYBOLD software | (2) Fixtures | Thermocouples | SIEMENS PC/PLC using Windows NT software | Plumbing for gases | PC / PLC with all alarms | (2) Shields: | Electrical and mechanical drawings | Manuals.
  • PFEIFFER / BALZERS: TPU 240

    Details
    ID#:
    9094724
    Category:
    Pumps
    Turbo pump | Pumping speed: for N2 230 l/s | Ultimate pressure with rotary vane pump 1x10-10 mbar | Recommended Backing Pump 1.5-16 m3 | Air or Water Cooling available | Turbo Pump part number: P01 330 | The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side | Turbo pump designed for a wide range of applications in research industry | Pfeiffer Balzers controller not included.
  • LEYBOLD OPTICS: 44210454

    Details
    ID#:
    9044889
    Category:
    Spare Parts
    Beam generator | For LEYBOLD OPTICS ESV 14-D.
  • PFEIFFER / BALZERS: TPU 170

    Details
    ID#:
    9094727
    Category:
    Pumps
    Turbo molecular pump | ISO100 Inlet Flange, KF25 Outlet Flange | Pumping speed: for N2 170 l/s | Ultimate pressure with rotary vane pump < 1x10-10 mbar | Air or Water Cooling available | Pump equipped with two ceramic bearings | The installation attitude can be selected from vertical to horizontal | Pfeiffer Balzers TCP -310 Turbo Pump controller not included.
  • PFEIFFER / BALZERS: TCP 380

    Details
    ID#:
    9161807
    Category:
    Spare Parts
    Sputtering deposition chamber | Pheiffer balzers TPH 510 Turbomolecular pump | Pheiffer balzers TCP 380 controller | Sputtered films matching network | Mass flow controllers.
  • BALZERS: BA 510

    Details
    ID#:
    35733
    Category:
    Evaporators
    Vacuum evaporator | | Includes | Stainless water traced bell jar (20" x 25") | (2) Viewports on a 22" OD stainless steel baseplate with hydraulic hoist | (2) High current feedthroughs | Pumping system: DIF200 diffusion pump, 2000 l/s | Water cooled baffe: Balzers BFA200W | Electropneumatic valves | Vacuum system controller: Balzers PC101 | Direct drive mechanical roughing pump: Balzers DUO030A, 26.5 cfm | Evaporative systems: Filament transformer | Manual shutter with motorized horizontal substrate rotation | Digital cold cathode: Balzers PKG100 | Pirani gauge.
  • LEYBOLD: WSU501 D40BCS

    Details
    ID#:
    175084
    Category:
    Pumps
    PFPE prepper blower package for Leybold pumps, P/N 8000082378010.
  • LEYBOLD HERAEUS: ULTRATEST M

    Details
    ID#:
    9012263
    Category:
    Leak Detectors
    Helium leak detector with spare Leybold readout module.
  • BALZERS: LLS 802

    Details
    ID#:
    9167620
    Category:
    Sputtering Systems
    Wafer Size:
    6" 
    Metal sputtering system, 6" | Twin chambers | (5) Targets | Configured nife | Copper | Chrome | (1) POLYCOLD EFC 660-HC | (1) Main cabinet | (1) Control cabinet | (2) LEYBOLD Trivac pumps | (1) LEYBOLD Root blower | Gases: | Argon | Nitrogen | Currently de-installed and crated.
  • LEYBOLD HERAEUS: 800

    Details
    ID#:
    146083
    Category:
    Box Coaters
    Vintage:
    1975 
    Capacitor Grade Metallizer | Can also be used for hot-foil stamping and release coating, Al / Zinc | | Specifications: | Al /Zinc Coating | Also for hot-foil stamping & release coat. Al /Zinc Coating | 800 mm web width, 830 mm chill roll width | 400 mm dia x 3” core 1-position Unwind & Rewind | 115 x 25 x 12 mm boats -9 nos | 1.5 mm dia Wire | 4~4.5 g/m evaporation/ 6 to 9 KVA/boat consumption | Leybold DK200 Rotary Pumps -2 nos | Leybold R1600 Root Pumps -2 nos. 12000 ltr/hr, 7.5 kW heaters Leybold Scientific Oil Diffusion Pump | 36,000 ltr/hour Edward Scientific Booster Pump | Cryogenic (max -110 C) | 10 TR Chilling plant using R22 gas. Refrigeration | Chiller for metallizer main drum (max -30 C) | Suitable for 4~250 um Polyester, BOPP. 15~250 um heat sealable BOPP | 20~250 um LDPE, PVC | 10~120 um HDPE | 15~120 um LLDPE | 20~50 um CPP | 300~400 mtr/min | | Currently installed | 1975 vintage.
  • LEYBOLD HERAEUS: Z600 D4

    Details
    ID#:
    9117827
    Category:
    Sputtering Systems
    Vintage:
    1984 
    Sputtering system | Configuration: | Load stage | Load lock | Deposition chamber | Load lock heating chamber | Deposition chamber | Load lock | (3) Station process module 104: | Configuration: | Center station | (3) Target positions | (2) LEYBOLD Sputtering guns, 19”X3.5”: Ni, Al | (2) ADVANCED ENERGY Sparc-le 20 arc suppressors heated section | (1) PINNACLE Power supply: 3152327-002A | Pump & controller: | (1) Turbo pump: LEYBOLD Mag W 1500C | (1) LEYBOLD TP-0 Turbo controller | Instrumentation: | (1) MKS 4 Channel mass flow controller: Type 257 | (1) MKS Mass flow controller: Type 1179 200 SCCM | (1) MKS Baratron 50mT full scale | (1) TERRA NOVA Model 908A dual capacitance diaphragm gauge | (1) INSTRUTECH Hornet IGM 401 Hot cathode ion gauge | (2) Worker bee CVG101 convectron gauges | (1) OMRON EJ1 Temperature control | System control: | (1) PLC Control (OMRON Zen) | (3) Station process module 119: | Configuration: | Center station | (3) Target positions | (3) Leybold Sputtering guns, 19”X3.5”: Bi2Te3, Sb2Te3 | (3) ADVANCED ENERGY Sparc-le 20 arc suppressors | Pump & controller: | (1) Turbo pump: LEYBOLD Mag W 1500C | (1) LEYBOLD TP-1 Turbo controller | Instrumentation: | (1) MKS 4 Channel mass flow controller: Type 257 | (1) MKS Mass flow controller: Type 1179 200 SCCM | (1) MKS Baratron 50mT full scale | (1) TERRA NOVA Model 908A dual capacitance diaphragm gauge | (1) INSTRUTECH Hornet IGM 401 Hot cathode ion gauge | (2) Worker bee CVG101 convectron gauges | System control: | (2) ADVANCED ENERGY MDX-5K DC Power supply | System control: | (1) PLC Control (OMRON Zen) | (2) Station process module 138: | Configuration: | (6) Target positions | Pump & Controller: | (2) Turbo controller: LEYBOLD Turbotronik NT1000/1500 | Instrumentation: | (1) Worker bee CVG101 convectron gauge | Input lock module 130: | Configuration: | Lift | Pump & controller: | (1) Turbo pump: LEYBOLD 1500 | Instrumentation: | (1) INSTRUTECH Hornet IGM 401 hot cathode ion gauge | (2) Worker bee CVG101 convectron gauges | System control: | (1) PLC Control (OMRON Zen) | Input lock module 140: | System control: | (1) PLC Control (OMRON Zen) | Exit lock module 94: | Configuration: | Lift | Water cooled platform | Instrumentation: | (1) INSTRUTECH Hornet IGM 401 hot cathode ion gauge | (2) Worker bee CVG101 convectron gauges | (4) Load & unload modules 101, 143, 144, 145: | Additional pumps: | (2) LEYBOLD Turbovac 1000C | (2) LEYBOLD Turbovac 1500 | (1) LEYBOLD Trivac D30A mechanical pump | (4) LEYBOLD Trivac D60A mechanical pumps | (2) LEYBOLD Trivac D65B mechanical pumps | (2) EDWARDS RV8 Mechanical pumps | (2) Leybold breaker panel | (1) Fuse: 25 & 35 Amp | Modules: | (4) Load / Unload modules | (2) Input lock modules | (1) Output lock module | (2) 3 Station process modules | (1) 2 Station process module | Sputtering accessories: | (5) LEYBOLD Sputtering guns: 19"x3.5" | (4) Sputter gun assemblies: Adjustable magnet | (5) ADVANCED ENERGY Sparc-le 20 arc suppressors | (1) PINNACLE Power supply: 3152327-002A | (2) ADVANCED ENERGY MDX-5K DC Power supplies | (2) RF Power generator: HUTTINGER IS2.5/13560 | Vacuum system components: | (3) Turbo pumps: LEYBOLD Mag W 1500C | (2) LEYBOLD Turbovac 1000C | (2) LEYBOLD Turbovac 1500 | (1) LEYBOLD Trivac D30A mechanical pump | (4) LEYBOLD Trivac D60A mechanical pumps | (2) LEYBOLD Trivac D65B mechanical pumps | (2) EDWARDS RV8 Mechanical pumps | (1) LEYBOLD Ultratest M2 leak detector | (1) LEYBOLD TP-0 Turbo controller | (1) LEYBOLD TP-1 Turbo controller | (2) Turbo controllers: LEYBOLD Turbotronik NT1000/1500 | Deposition instrumentation: | (2) MKS 4 Channel mass flow controllers: Type 247 | (2) MKS Mass flow Controllers: Type 1179 200 SCCM | (2) MKS Baratron 50mT full scale | (2) TERRA NOVA 908A Dual capacitance diaphragm gauges | (4) INSTRUTECH Hornet IGM 401 hot cathode ion gauges | (9) Worker bee CVG101 convectron gauges | (1) OMRON EJ1 Temperature control | Process control: | (5) OMRON Zen PLC module | Custom sputter deposition system | Chamber: | (1) Vacuum chamber: 21" Diameter, ~16" tall | (2) Viewports with shutters | (1) Hydraulic lift for top plate | (1) Air actuated gate valve | (1) Throttle valve | (1) Rotating substrate holder | (2) Magnetron sputter guns: 4" Diameter | Chamber control instrumentation: | (1) YASKAWA SGMCS-14C3B11 Servo motor | (1) YASKAWA SGDH-04AE Servo controller | (1) WATLOW 989 Temperature controller | Pressure monitoring: | (1) INSTRUTECH Hornet ion gauge | (1) INSTRUTECH Worker bee convectron gauge | (1) MKS Baratron | (1) MKS 270B Signal conditioner | Gas control | (1) MKS 2259C-00100RV 100 SCCM Mass flow controller | (1) MKS 1529B-00200RV 200 SCCM Mass flow controller | (1) MKS 247C 4 Channel mass flow controller | Power supplies | (1) MDX Magnetron power supply | (2) Sparc-le 20 arc suppressor | Vacuum system: | (1) TURBOTRONIK NT 1000/1500 Turbo controller | System control: | (1) OMRON Zen PLC | Documentation & Manuals | Currently de-installed | 1984 vintage.
  • LEYBOLD HERAEUS: Turbovac 150

    Details
    ID#:
    9097226
    Category:
    Pumps
    Pump | Pumping speed: 115lit/sec | Ultimate Pressure: < 1 x 10-10 | Inlet flange: CF Flange | Backing connection: KF25 | Minimum size backing pump: 6 CMH | Recommended Backing Pump: Leybold D4B – D16B | Cooling: Water.
  • BALZERS: SCS 800

    Details
    ID#:
    153751
    Category:
    Evaporators
    Evaporators, cubic | Includes: | BALZERS Primary pump | Roots pump | Cryo pump with LEYBOLD Compressor | RF Power Supply.
  • EDWARDS / LEYBOLD: VDF32

    Details
    ID#:
    152790
    Category:
    Pumps
    Vacuum system | Consists of: | EDWARDS / LEYBOLD DP100P pump for TEOS CVD | LEYBOLD Ruvac WSU-1000 blower | THERMOVAC TM 21/22 controller | HVA gate valve 11214-0401R | Pump run time: 18280-0 | Process time: 3634-25 | Specifications: | 100P vacuum pump: | Part # E13874 | Pumping speed: 100 m3/h | Ultimate pressure: 1 x 10^-2mbar | Maximum exhaust pressure: 1500 mbar | Utilities: 3-phase, 200-208VAC, 15A, 60Hz | Rotational speed: 3600 RPM.
  • LEYBOLD HERAEUS: A550 VZK

    Details
    ID#:
    131737
    Category:
    Sputtering Systems
    Sputtering system | Throughput: 10 substrates, 3" diameter | Microprocessor controlled | Turbo pumped | Final vacuum: 5 x 10^-7 mbar | RF Power supplies: IS 7.5 and TIS 1.2 | Vacuum chamber: | ~24" Diameter | Baffles for pre-sputtering and sputter-etching | Water cooled substrate carrier | Substrate mounting plate | System components: | LEYBOLD system | LEYBOLD Sputtering chamber: ~24” in diameter | LEYBOLD RF-etching, RF sputtering | LEYBOLD Matching network | LEYBOLD RF-bias, Penningvac, Medel PMhsz | LEYBOLD TMP450 Turbo pump | LEYBOLD NT450 Controller | LEYBOLD ES 7.5 RF Power supply, 13.56 MHz, Huttinger | LEYBOLD Control rack: 18kVA, 35A | LEYBOLD Thermovac TM 220S2 | LEYBOLD Penningvac PM 411S2 | (2) LEYBOLD ME03 0-10V | (2) LEYBOLD ATP 01 Digital displays | (2) LEYBOLD Auto switches | Display screen.
  • LEYBOLD HERAEUS: 10170KIT

    Details
    ID#:
    9030671
    Category:
    Spare Parts
    Major repair kit for LEYBOLD D30A.
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