LEYBOLD BALZERS ARISTO 500S Products

  • BALZERS: BAK 760

    Details
    ID#:
    9071169
    Category:
    Evaporators
    Evaporator | E-beam and substrate heating | | Compact High Vacuum Coater | (1) Rotary drive motor | (1) Substrate holder 4" | (1) High-Vac plate valve DN 500 mm | (1) Fore-vacuum valve | (1) Bypass valve | (1) Vent valve for N2 | (1) Chevron | Vacuum measurement cells: Leybold 1 | (2) TPR280 foreline and high vac pump | PKR251 Chamber | | Vacuum Pumps | Medium pump stand | EDWARDS GV80 EH 500 Dry pump/Roots blower 250 m3/h | DUO + ROOTS, with test | Hi vacuum pump | Diff 500 A with baffle: Balzers | | Water battery for cold water distribution | Cold-water 20°C | Flow meter on each line | | EMO | High safety devices | Door monitor | | Balzers High Voltage Cabinet EHV110 | EKS 110 / ETS 110 rack | HV EHV110 | (1) E-Gun: Balzers ESQ 110 | Shutter | EDE 110 Servomotor | EHS 110 Filament transformers | Source with 4-hole crucible | | Control Cabinet | PLC Siemens S7 | Visualisation Siemens WinCC flexible | Windows PC 17- 19” TFT | Programmable start | Automatic/manual vacuum control | Disengagable interlocks | Display of the vacuum values | Visualisation of the system status | Data log | Leak rate test function | Password controlled access – free setting of user | Groups (for example engineer, service, operator aso.) | | Deposition Controller | Inficon Maxtek, XTC/2 or eq. | (1) Single quartz sensor - connected to single crystal oscillator | Vacuum feedthrough | | Options available: | Protection shields | Heater | E-Beam (new) | Thermal evaporator, 3.5 kW | Glow discharge | Ion gun: K&R | | CE Marked | 3 x 400 VAC, 63 A, 3 Ph+N+NE, 50 Hz.
  • LEYBOLD HERAEUS: Z650

    Details
    ID#:
    27258
    Category:
    Sputtering Systems
    Sputtering system equipped with load lock / exit chamber with Leybold Trivac D65B prevacuum pump, Leybold Turbovac 1000 turbo molecular pump, and RF plasma cleaning. Process chamber A with Alcatel 2063 prevacuum pump and Pfeiffer TMH1001P turbodrag pump (TMH is as good as new), 3 x new PK 200 sputtering cathodes positions, RF and DC sputtering power supply, (combined with process chamber B), Balzers QMG064 massaspectrometer; Process chamber B with Leybold Trivac D65B prevacuum pump, Leybold Turbovac 1000 turbo molecular pump, 2 x new PK 200 sputtering cathodes positions, 1x substrate heating position, RF and DC sputtering power supply, (combined with process chamber A), RF bias, Balzers QMG064 massaspectrometer, can be retrofitted to your specs.
  • LEYBOLD: WSU501 D40BCS

    Details
    ID#:
    175084
    Category:
    Pumps
    PFPE prepper blower package for Leybold pumps, P/N 8000082378010.
  • BALZERS: BAK 760

    Details
    ID#:
    9038361
    Category:
    Evaporators
    Evaporator | Previously used for: | Multi layers oxyde thin films (SiO2 and TiO2) | Metallics coatings: Ti, Ni, Cr | | Includes: | BPU 431 | BPU 420E | TPG 300 | RVG 040 | RME 010 | Valve PVA 500 P2 | IMG 300 Ion gauge control | E-Beam control EEC420 | Valve drawer VAT DN 63 | Valve RVE010 | Diffusion pump | Polycold | Gun | Chiller | | Specifications: | IKG >10-3<10-9 mbar | Roots WKP500A 440 M3/H | Diff. 500A: 11500 l/s | Cap. heater: 6 kW | Trap nitrogen BFA 500: 9000 l/s | Polycold PFG 650-11st: -100º/-140º C | Pump Leybold Trivac D65B: 65 m3 | Gauge 010 IKR: 10-3 to 10-8 mbar | Primary gauge: Tpr 10: < 10-3 mbar | Head quartz crystal QSK521A: 6 quartz | EHV Power supply: 18 215 HT: 15.6 kW | ECS Coil power supply: +/- 2.5 A | EFS 200 Filament power supply: 60 A | Electron gun ESQ212: 12 kW | Volume: 0.92 m3 | Flow (cold water): 6 l/mm | GVW: 2000 kg max | Air pressure: 5-8 bar | Compressor: -25º C | Electrical voltage: 380 V.
  • PFEIFFER / BALZERS: TPU 240

    Details
    ID#:
    9094724
    Category:
    Pumps
    Turbo pump | Pumping speed: for N2 230 l/s | Ultimate pressure with rotary vane pump 1x10-10 mbar | Recommended Backing Pump 1.5-16 m3 | Air or Water Cooling available | Turbo Pump part number: P01 330 | The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side | Turbo pump designed for a wide range of applications in research industry | Pfeiffer Balzers controller not included.
  • BALZERS: Chamber

    Details
    ID#:
    58024
    Category:
    Box Coaters
    42" box Chamber | The chamber has a LN2 trap | There is no planetary system with this unit | Includes Leybold-Heraeus, type #01.12000.12.B diffusion pump | CV-8 power supply.
  • BALZERS: LLS 802

    Details
    ID#:
    9121967
    Category:
    Sputtering Systems
    Wafer Size:
    6" 
    Etch and deposition system, 6" | Twin chamber | Magnetron: AK 518 | (5) Target | Configured NiFe, Copper, Chrome | (2) Polycold 550.H | Main power cabinet | Control cabinet | (2) Trivac D 40B pumps | (2) Leybold WSU 251 US roots blowers | Gases used: Argon, Nitrogen.
  • LEYBOLD HERAEUS: 10170KIT

    Details
    ID#:
    9030671
    Category:
    Spare Parts
    Major repair kit for LEYBOLD D30A.
  • BALZERS: BA 510

    Details
    ID#:
    186817
    Category:
    Evaporators
    Bell jar system | (3) Thermal Sources | Shutters | 510mm Diameter | Pump system | -Diffusion pump Balzers Diff 200 | -Balzers Buffle BFA 200 | -Freon compressor PW3K7 with R413A | -Pfeiffer rotary pump DUO 030A | -n°2 Balzers EVA 040P | -Balzers vent valve EVM016 | -Balzers high vacuum valve PVA 200PD with Throttle function | Instruments for vacuum controls | -Balzers TPG 070 with 3 TPR 010 | -Balzers IKW 010 with IKG 020 with set points for run process | -PC 101 for automatic pumping control | Process Systems | -Balzers BPU 100 automatic systems process control for n°4 sources and 36 layers. | -Quarz Monitor Balzers QM101 With head QSK 300 | -N° 2 thermal source working with automatic system BPU and thyristor Eurotherm | -Automatic Balzers shutter for both sources | -Automatic rotary system BD104 | Electrical System | -3P-N-GND 380V for 50hz | -EEO 101 safety stop | -ERE 101 connection box | -EPC 301 distribution power box | -Water cool valves and flows switches | -Electrical and water predisposition for E-Gun | Includes operation and maintenance manuals. |
  • BALZERS / EVATEC: BAK 760 C

    Details
    ID#:
    9137693
    Category:
    Evaporators
    Evaporator | (1) Chamber | System Controller Type: BPU431 | Software version: V04R26 | | Gas/ process controller: MKS 270 | Gas/ chemical analyzer: Balzers QMA400 | Line 1 Ar 200 sccm Unit | | (2) Zone lamp heater | T/C Configuration: inside process chamber | | Vacuum: | Pressure controller | Chamber Vacuum Pumps | Cryo Compressor | Foreline Pumps | | Power distribution unit | (2) Roughing pumps | Cryo compressor | EH215 | ECS200 | EFS200 | Electronics cabinet | Water battery | RF generator and matchbox | Loadarm calotte | | 3 phase, 50Hz, 400V 80A. |
  • LEYBOLD HERAEUS: ZV 1200

    Details
    ID#:
    167739
    Category:
    Sputtering Systems
    Sputtering system | (1) Evaporation chamber | (2) PVD sputtering chambers | Station load | Chamber loadlock | Chamber buffer - heat - clean | Chamber process 1 | Chamber process 2 | Chamber process 3 | Chamber unloadlock | Station unload | Conveyor pallet return | Pumps: mechanical + Leybold 450 turbo on process chamber | Deinstalled.
  • BALZERS: UMS 500

    Details
    ID#:
    144768
    Category:
    Evaporators
    Special Ultra High Vacuum System | With a pressure < 3x 10e-11mbar | (1) Balzers Electron Beam Power Supply EHV 110A | (2) Balzers Electron Gun Control EKS 110A | (1) Balzers RTC 110 Rate Controller | (2) Balzers ES300 E-Guns | (1) Balzers Ion Gauge Control IMG 070 | (1) Balzers Sublimation Control USS 110 | (1) Balzers UMS Control UMC 101 | (1) Pfeifer Turbo Pump Power Supply TCP 300 | (1) Balzers Heater Control Unit UAS 301 | (1) Advanced Energy ID 2500 Ion Beam Drive | (1) Ion Beam Source | (1) Balzers Quadrupole Mass Spectrometer QMG511 | (1) Varian TSP control Unit Model VT922-0052 | (1) Balzers Temperature Control Unit 0° to 400°C | | Water Distributor Rack | | Includes Documentation with drawing and schematics.
  • BALZERS: BA 510

    Details
    ID#:
    35733
    Category:
    Evaporators
    Vacuum evaporator | | Includes | Stainless water traced bell jar (20" x 25") | (2) Viewports on a 22" OD stainless steel baseplate with hydraulic hoist | (2) High current feedthroughs | Pumping system: DIF200 diffusion pump, 2000 l/s | Water cooled baffe: Balzers BFA200W | Electropneumatic valves | Vacuum system controller: Balzers PC101 | Direct drive mechanical roughing pump: Balzers DUO030A, 26.5 cfm | Evaporative systems: Filament transformer | Manual shutter with motorized horizontal substrate rotation | Digital cold cathode: Balzers PKG100 | Pirani gauge.
  • BALZERS: Lot

    Details
    ID#:
    9055198
    Category:
    Spare Parts
    Lot of Spare Parts: | | QTY | PART NUMBER | MODEL | DESCRIPTION | (1) B 5123 203AA TB-BA-4/220-160/S DC MOTOR AMPLIFIER / CONTROL PCB | (1) BG 542 380-T TB-BA-4/220-160/S DC MOTOR AMPLIFIER / CONTROL PCB | (1) BG 542 380-T TB-BA-4/220-160/S DC MOTOR AMPLIFIER / CONTROL PCB | (1) B 5278 853 PH-E LSI 11/23 M8186 MICRPROCESSOR MODULE, DEC, PCB - PRO 420 / VAC 420 | (1) B 5278 865 FC MXV 22M MXV-DISC DRIVE CONTROL MODULE, MTI PCB - PRO 420 | (1) BG 512 780-T/F MM 420 MULTIFUNCTION MODULE, PCB - PRO 420 | (1) BG 512 800-T IA 420 ANALOGUE I/O MODULE, PCB - PRO 420 | (1) BG 440 500-BT RV 420 GAS CONTROL MODULE (2CH), PCB - PRO 420 | (1) BG 541 175-S PI 420 PIRANI MODULE, PCB - VAC 420 | (1) BG 545 470-T EE 420 EMISSION CONTROL MODULE, PCB - EEC 420 | (1) B 4787 149HA 2 OM 3 RELAY OUTPUT MODULE, MURRELECTRONIC, 16 WAY, DIN RAIL MOUNT - ST 700 / PRO 420 | (1) B 5181 830 1D EHV 215 - U5 AUXILLARY POWER SUPPLY, PCB, EHV 215 | (1) B 5181 8302B ECS 200 DEFLECTION POWER AMPLIFIER, PCB - ECS 200 | (1) BG 543 048-T HGG 700/2000 GLOW DISCHARGE MEASUREMENT BOARD, PCB - HGG 700/2000 | (1) BG 527 050U EXT CARD EXTENDER BOARD, PCB - BPU 100 | (5) B 4079 155 P ESQ 110 L RING GASKET, 14/24x7mm | (1) BG 545 110-T ESQ 212 POSITION BOARD, PCB - ESQ 212 EB GUN | (1) BB 166 761-T ESQ 212 EBGUN BODY, END PLATE, HIGH PURITY COPPER, ESQ 212 | (1) BK 203 525 ESQ 212 GEARED WHEEL - ESQ 212 | (2) B 4317 145 AF ESQ 212 WORM WHEEL B05100 1r0, 5x100mm | (2) B 4316 100 AF ESQ 212 WORM, ETG100, S 5H1R 1r-0.5 | (1) QSK 610 / 610A QSK QUARTZ MEASURING HEAD, BODY ONLY, INCOMPLETE | (2) BG 524 181 QSK 610 / 610A DISC - QSK 610 / A | (1) BG 524 142-X QSK 610 / 610A PICK UP SHOE, GOLD - QSK 610 / A | (5) BG 542 191 QSK 610 / 610A CONNECTION STRIP, GOLD - QSK 610 / A | (1) QSK 610 / 610A OUTER CONTACT STRIP, GOLD - QSK 610 / A | (2) BG 524 149 QSK 610 / 610A CAP LOCKING PIN, QSK 610 / A | (1) BG 4524 138 UA QSK 610 / 610A QUARTZ MAGAZINE, COMPLETE - QSK 610 / A | (1) BG 524 139 T QSK 610 / 610A QUARTZ COVER, COMPLETE - QSK 610 / A | (1) BG 543 848-T QSK 610A QSK CONTROL BOARD, PCB - QSK 610-A | (1) RBG 543 848-T QSK 610A QSK CONTROL BOARD, PCB - QSK 610-A (RTC SYSTEMS VERSION) | (1) B 4082 210 F BD-104 Felt Ring 16/28x6 - BD-104 ROTARY DRIVE | (1) B 4079658PF EHV 110 A TRIODE, BRIM SEAL, 100/130mm x 13mm - EHV 110A HV SUPPLY | (1) BG 202 762 EHV 110 A TRIODE SUPPORT RING - EHV 110A HV SUPPLY | (1) 3CW20000A7 EHV 110 A TRIODE , EIMAC, 3CW20000A7, WATER COOLED | (1) VIEWPORT ISO-F VIEWPORT, WELDING FILTER, SHUTTER, KIT - BALZERS BAK 760.
  • BALZERS: BAF 301D

    Details
    ID#:
    70883
    Category:
    Etchers / Ashers
    Freeze-etching system for TEM sample preparation, with 19" tall x 15" wide vacuum chamber with tapered rear wall. 18" deep at bottom & 13" deep at top, with full opening O-ring sealed hinged door with 6" ID viewport. The chamber has additional KF and ISO ports. The pumping system consists of a Balzers Dif 900 diff pump and a MCG 900 combo LN2 trap with a rated pumping speed of 450 l/s at the inlet of the baffle. Electropneumatic valves are used throughout and a Duo 30A 26.5 cfm two-stage direct drive roughing pump is also included. Sample temperature is controlled by a Balzers GA1 freeze etching control unit from -150 to +50ºC with LN2 required for cooling. Additionally, a filament transformer with output of 4, 8 & 16 volts for carbon evaporation and a Balzers QSG 201 film thickness monitor with QSK113 crystal holder. A vacuum system controller is not provided.
  • LEYBOLD OPTICS: 44210454

    Details
    ID#:
    9044889
    Category:
    Spare Parts
    Beam generator | For LEYBOLD OPTICS ESV 14-D.
  • OERLIKON / BALZERS: Univex multichamber

    Details
    ID#:
    9140170
    Category:
    Sputtering Systems
    Vintage:
    2013 
    Multichamber sputtering system | Brooks front-end loader | Sputtering edge chamber | (2) Deposition chambers | (4) Targets per chamber | Heated chucks | Chamber lids have auto lift | Run expentance wafers | Transfer module w/ brooks magna tran robot | P/N : 201600-01-0029 | CoolVac 2000-CL/CP 7.25 cryopump | (1) Process module (PM1) | AE RF Navio 3155401-002A matching network | CoolVac 800-CL-V/CP-7/25 cryopump | (1) Process module (PM2) | CoolVac 1500-CL-V/CP-7/25 cryopump | TurboVac 1000C turbopump | (1) Process module (PM3) | AE RF Navio 3155401-002A matching network | CoolVac 1500-CL-V/CP-7/25 cryopump | TurboVac 1000C turbopump | (1) support electronics/gas cabinet | (4) VAT PM-5 adaptive pressure controller | (2) Trumpf-huttinger elektronik truplasma DC 4001 generators | (4) Trumpf-huttinger elektronik truplasma DC 3002 generators | (2) Leybold turbodrive TD20 classic turbopump controllers | (2) Advanced energy MDX-500 RF generator | (2) Advanced energy Cesar RF generator | (3) Advanced energy DC pinnacle plus RF generator | 600W 13.56MHz | (2) Leybold coolvac power supply | (33) mass flow controllers, 400V, 142A, 80kW | (5) Leybold SC30D dry scroll vacuum pump | (2) Oerlikon coolPak 6200H helium compressor cat# 840000V6201 | (1) Eurocold ACW-LP 12 AL OR SL (15/27 R407C 230/1/50 chiller) | Numerous spare parts | P/N : S170848 | 2013 vintage.
  • UNAXIS / BALZERS: LLS 502

    Details
    ID#:
    112177
    Category:
    Sputtering Systems
    Wafer Size:
    4" 
    Sputtering systems, 4" | | Specifications: | | Main body: | Model: Balzers LLS 502, 3x400/230V 50/60Hz | (2) CT8F cryo pumps | (1) DU0030 Lotary pump | | Substrate holder: | 3 type of Balzers substrates can be used: | 4" dia X 0.5mmt | 4" dia X 1.2mmt | 4" dia X 2.0mmt | | Gas box: | For Sputter, 1 x MFC: Ar. 500 sccm | For Etching, 2 x MFC: Ar. 20/50 sccm | For Slow Vent, 1 x MFC: N2. 5000 sccm | | DC-PM cathode: | Model: (5) Balzers AK515 | Cathode Length : 5" x 15" | Stack sputter | | DC Cathode power: | Model: Advanced Energy MDC 5KX | Maximum Power : 5KW | | (4) Magnet systems: | (3) Balzers MB 515 For Cu. Cr. Ti. | (1) Balzers MC 515 For PamaAroi, Ni80/Fe20 | | Substrate Heating Heaters: | Balzers MCC Ni50/Fe50 | For Load Block chamber: | Quartz Ramp Heater | Heater Capacity : 2 KW | Maximum Temperature : 200 Degree | For Process chamber : | Quartz Ramp Heater | Heater Capacity : 4 KW | Maximum Temperature : 400 Degree | | Ion Beam Etching System For Load Lock chamber: | Model: Inotech Linia Ion gun | Length : 6.0 x 30.0cm | Acceleration Voltage : 0-1000 V | Beam Current : 300mA | Ar Gas flow : 10 sccm | Working distance : 28 / 29cm | Cooling Method | Power : MPS500IPBN | New Driver | | Chamber Cover: Balzers stainless steel | | Transformer trance: Yamamitu Denki | 1st : 3 layers 200V 3phases | 2nd : 3 layers 400/230V 5phases | Capacity : 40KVA | Length : about 700W x 700D x 780H | | Target material: | Length : 5" x 15" | Material : Ti, Cu, Cr, FeNi | | Chiller unit: Miura Zimusyo | | Maintenance hoist: Balzers | | DC Bias: Above 150V | | Poli code: PFC 400 | Power : 3 layers 200V 3Ph 16A | Capacity : 3.2 KVA | cooling Water : 3.8 lpm / 18 degree | (1) DC pulsed, 5KW | (1) RF, 3KW | | Currently de-installed and warehoused | Decommissioned in 2007 | 1995-1996 vintage.
  • LEYBOLD HERAEUS: SYRUSpro 1105

    Details
    ID#:
    9071052
    Category:
    Evaporators
    Evaporator | Vacuum pumping group | Rotary pump | Standard dome: (2) sectors, (2) lens rings | Flip Over Dome | Process Control System: Leybold Pro Com Software | Modem with software | (2) Internal Protection shields | Rotary Feed Through with Lens Turning System | 6-pocket Electron Beam Evaporation System | Gas Inlet System | Quartz Film Thickness Measuring Unit | Ion Source Plasma Type | Cryo Cooler | Meissner Trap | Flow Box/Flaminar Flow Booth | Bead Blasting Unit | Warm Water Unit | Oven | Water Chiller.
  • LEYBOLD HERAEUS: A550 VZK

    Details
    ID#:
    131737
    Category:
    Sputtering Systems
    Sputtering system | Throughput: 10 substrates, 3" diameter | Microprocessor controlled | Turbo pumped | Final vacuum: 5 x 10^-7 mbar | RF power supplies: IS 7.5 and TIS 1.2 | | Vacuum chamber: | ~24" diameter | Turbo pumped | Baffles for pre-sputtering and sputter-etching | Water cooled substrate carrier | Substrate mounting plate | | System Components: | Leybold system | Leybold Sputtering chamber: Approximately 24” in diameter | Leybold RF-Etching, RF Sputtering | Leybold Matching network | Leybold RF-bias, Penningvac, Medel PMhsz | Leybold Turbo pump model TMP450, Leybold controller Model NT450 | Leybold RF Power supply model ES 7.5, 13.56 Mhz, Huttinger | | Leybold Control Rack: 18Kva, 35A: | Leybold Thermovac TM 220S2 | Leybold Penningvac PM 411S2 | (2) Leybold Model ME03 0-10V | (2) Leybold Model ATP 01 Digital Displays | (2) Leybold Auto Switches | 8 Total (4 per side) Up/Down Control Arrows | Display Screen | Keypads: Alpha and Numeric | Mushroom Style EPO/EMO | Access | | System Design | The 590-mm diameter vacuum chamber incorporates: | - Turbo pumped | - Baffles for presputtering and sputter-etching | - The water-cooled substrate carrier, and | - The substrate mounting plate.
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