LEYBOLD BALZERS ARISTO 500S Products

  • LEYBOLD HERAEUS: Z650

    Details
    ID#:
    27258
    Category:
    Sputtering Systems
    Sputtering system equipped with load lock / exit chamber with Leybold Trivac D65B prevacuum pump, Leybold Turbovac 1000 turbo molecular pump, and RF plasma cleaning. Process chamber A with Alcatel 2063 prevacuum pump and Pfeiffer TMH1001P turbodrag pump (TMH is as good as new), 3 x new PK 200 sputtering cathodes positions, RF and DC sputtering power supply, (combined with process chamber B), Balzers QMG064 massaspectrometer; Process chamber B with Leybold Trivac D65B prevacuum pump, Leybold Turbovac 1000 turbo molecular pump, 2 x new PK 200 sputtering cathodes positions, 1x substrate heating position, RF and DC sputtering power supply, (combined with process chamber A), RF bias, Balzers QMG064 massaspectrometer, can be retrofitted to your specs.
  • BALZERS: LLS 801

    Details
    ID#:
    9004740
    Category:
    Sputtering Systems
    Vintage:
    1987 
    Sputtering system | | Configuration: | Lock chamber | Gas inlet LC | Pfeiffer TPH 170 turbo pump, controller TCP 300 | Main chamber with (5) positions | Heater | (3) AK 517 Magnetron, magnet system “B” | Blanking flange | Meissnertrap | Gas inlet MFC | SSC 101 Balzers shutter control unit | TSC 101 Balzers transport control unit | Prevacuum oil pump DUO 030A Pfeiffer | Balzers vacuum measuring system | Cryopump Balzers RCP 250 with cold head APD DE 208 | Cryo compressor Balzers | Substrate holder without pallets | Original control DEC system with partial upgrade, emulator for data storage, screen and keyboard | Water distributor, original configuration | Capacitive gauge 0.1 mbar for process gas measuring with Maxigauge Pfeiffer vacuum readout unit | Step motor for rotary drive | MPS 120 Balzers magnetron power supply | ERE 201 with relay boards and LED indication | Documentation | 1987 vintage.
  • LEYBOLD HERAEUS: 10170KIT

    Details
    ID#:
    9030671
    Category:
    Spare Parts
    Major repair kit for LEYBOLD D30A.
  • LEYBOLD HERAEUS: A550 VZK

    Details
    ID#:
    131737
    Category:
    Sputtering Systems
    Sputtering system | Throughput: 10 substrates, 3" diameter | Microprocessor controlled | Turbo pumped | Final vacuum: 5 x 10^-7 mbar | RF power supplies: IS 7.5 and TIS 1.2 | | Vacuum chamber: | ~24" diameter | Turbo pumped | Baffles for pre-sputtering and sputter-etching | Water cooled substrate carrier | Substrate mounting plate | | System Components: | Leybold system | Leybold Sputtering chamber: Approximately 24” in diameter | Leybold RF-Etching, RF Sputtering | Leybold Matching network | Leybold RF-bias, Penningvac, Medel PMhsz | Leybold Turbo pump model TMP450, Leybold controller Model NT450 | Leybold RF Power supply model ES 7.5, 13.56 Mhz, Huttinger | | Leybold Control Rack: 18Kva, 35A: | Leybold Thermovac TM 220S2 | Leybold Penningvac PM 411S2 | 2 ea. Leybold Model ME03 0-10V | 2 ea. Leybold Model ATP 01 Digital Displays | 2 ea. Leybold Auto Switches | 8 Total (4 per side) Up/Down Control Arrows | Display Screen | Keypads: Alpha and Numeric | Mushroom Style EPO/EMO | Access | | System Design | The 590-mm diameter vacuum chamber incorporates: | - Turbo pumped | - Baffles for presputtering and sputter-etching | - The water-cooled substrate carrier, and | - The substrate mounting plate.
  • LEYBOLD HERAEUS: ZV 1200

    Details
    ID#:
    167739
    Category:
    Sputtering Systems
    Sputtering system | (1) Evaporation chamber | (2) PVD sputtering chambers | | Station load | Chamber loadlock | Chamber buffer - heat - clean | Chamber process 1 | Chamber process 2 | Chamber process 3 | Chamber unloadlock | Station unload | Conveyor pallet return | Pumps: mechanical + Leybold 450 turbo on process chamber | Deinstalled | Can be inspected.
  • BALZERS: UMS 500

    Details
    ID#:
    144768
    Category:
    Evaporators
    Special Ultra High Vacuum System | With a pressure < 3x 10e-11mbar | (1) Balzers Electron Beam Power Supply EHV 110A | (2) Balzers Electron Gun Control EKS 110A | (1) Balzers RTC 110 Rate Controller | (2) Balzers ES300 E-Guns | (1) Balzers Ion Gauge Control IMG 070 | (1) Balzers Sublimation Control USS 110 | (1) Balzers UMS Control UMC 101 | (1) Pfeifer Turbo Pump Power Supply TCP 300 | (1) Balzers Heater Control Unit UAS 301 | (1) Advanced Energy ID 2500 Ion Beam Drive | (1) Ion Beam Source | (1) Balzers Quadrupole Mass Spectrometer QMG511 | (1) Varian TSP control Unit Model VT922-0052 | (1) Balzers Temperature Control Unit 0° to 400°C | | Water Distributor Rack | | Includes Documentation with drawing and schematics.
  • PFEIFFER / BALZERS: TPH 2200 SG

    Details
    ID#:
    191053
    Category:
    Pumps
    Turbo molecular pump | PFEIFFER / BALZERS TCP5000 controller.
  • BALZERS: SCS 800

    Details
    ID#:
    153751
    Category:
    Evaporators
    Evaporators, cubic | Includes: | BALZERS Primary pump | Roots pump | Cryo pump with LEYBOLD Compressor | RF Power Supply.
  • LEYBOLD HERAEUS: ULTRATEST M

    Details
    ID#:
    9012263
    Category:
    Leak Detectors
    Helium leak detector with spare Leybold readout module.
  • BALZERS: BA 510

    Details
    ID#:
    35733
    Category:
    Evaporators
    Vacuum evaporator | | Includes | Stainless water traced bell jar (20" x 25") | (2) Viewports on a 22" OD stainless steel baseplate with hydraulic hoist | (2) High current feedthroughs | Pumping system: DIF200 diffusion pump, 2000 l/s | Water cooled baffe: Balzers BFA200W | Electropneumatic valves | Vacuum system controller: Balzers PC101 | Direct drive mechanical roughing pump: Balzers DUO030A, 26.5 cfm | Evaporative systems: Filament transformer | Manual shutter with motorized horizontal substrate rotation | Digital cold cathode: Balzers PKG100 | Pirani gauge.
  • LEYBOLD HERAEUS: 904

    Details
    ID#:
    9023528
    Category:
    Photoresist
    Coater | APS | (2) E-guns, typical Leybold crucibles | (2) Thermal sources | | Polycold: 10-7 Torr | Roots and rotary pump: Ruvac 501 and Leybold 65DB | Diffusion pump: Leybold 12000 | Polycold system for diffusion pump: Polycold 660 | Substrate rotation moter for speed control: Dome and planetary, AC control | Uniformity of film thickness over the job size: 200 within 2% | Uniformity using planetary: 0.5% on (4) 14" diameter substrate holders | Radiant heater with PID temperature controller | Glow discharge unit for ionic cleaning | Gas inlet systems with mass flow controller | Resistive evaporation | Automatic shutter control for all sources | | Includes: | Programming manual | PLC programming software with Ladder diagram | List of PCB along with inter connection details and their circuit diagrams | Fault diagnostic/connecting manual | Electrical circuit diagram | Vacuum, air and water line details.
  • BALZERS: Chamber

    Details
    ID#:
    58024
    Category:
    Box Coaters
    42" box Chamber | The chamber has a LN2 trap | There is no planetary system with this unit | Includes Leybold-Heraeus, type #01.12000.12.B diffusion pump | CV-8 power supply.
  • LEYBOLD HERAEUS: 800

    Details
    ID#:
    146083
    Category:
    Box Coaters
    Vintage:
    1975 
    Capacitor Grade Metallizer | Can also be used for hot-foil stamping and release coating, Al / Zinc | | Specifications: | Al /Zinc Coating | Also for hot-foil stamping & release coat. Al /Zinc Coating | 800 mm web width, 830 mm chill roll width | 400 mm dia x 3” core 1-position Unwind & Rewind | 115 x 25 x 12 mm boats -9 nos | 1.5 mm dia Wire | 4~4.5 g/m evaporation/ 6 to 9 KVA/boat consumption | Leybold DK200 Rotary Pumps -2 nos | Leybold R1600 Root Pumps -2 nos. 12000 ltr/hr, 7.5 kW heaters Leybold Scientific Oil Diffusion Pump | 36,000 ltr/hour Edward Scientific Booster Pump | Cryogenic (max -110 C) | 10 TR Chilling plant using R22 gas. Refrigeration | Chiller for metallizer main drum (max -30 C) | Suitable for 4~250 um Polyester, BOPP. 15~250 um heat sealable BOPP | 20~250 um LDPE, PVC | 10~120 um HDPE | 15~120 um LLDPE | 20~50 um CPP | 300~400 mtr/min | | Currently installed | 1975 vintage.
  • UNAXIS / BALZERS: Sirius 400

    Details
    ID#:
    9046353
    Category:
    Evaporators
    Custom UHV CVD system | Used to deposit silicon germanium (SiGe) | Low temperature 500-600°C | Reactor tube (double-walled quartz) | Furnace around reactor tube heats up to ~700°C | Heating control, load lock, wafer boat detection and boat transfer system | (2) Leybold TW 701 turbo pumps (load lock and process tube) | (3) Scroll VAC SC-15D rough pumps (load lock, process tube and RGA) | (1) Ebara AA20N-H pump (process tube) | Siemens S7 400 Programmable logic controller | Control cabinet (separate from process unit) | Clean air module (flow box) | Abrupt dopant (n and p type) profiles and SiGe profiles capable | Process gases: Germane (GeH4), Silane (SiH4), Diborane (B2H6), Phosphine (PH3) and Hydogen (H2) | GeH4, B2H6, and PH3 are diluted in helium | Helium is used for purging | Base pressure: 8e-9 mbar | Pressure during film growth: ~5e-3 mbar | Background partial pressure contaminants: 1E-11 mbar (turbopump) | Lowest film growth rates: 1-5A/min enables high precision | Film thickness uniformity (wafer): +/-0.2% (molecular flow) | Boron doping range: 1e16 to 2e20 atoms/cm3 | Phosphorus doping range: Up to 1e20 atoms/cm3 | Sharp concentration profiles: 10^3/20A | Zero slip | Ge concentration range: 0-100% | Typical growth rate: 5-30A/min | Edwards dry scrubber (dual system D150), 3 Phase, 208 Volts | (2) Gas reactor columns, (1) can be changed while the tool is running.
  • LEYBOLD OPTICS: 44210454

    Details
    ID#:
    9044889
    Category:
    Spare Parts
    Beam generator | For LEYBOLD OPTICS ESV 14-D.
  • BALZERS: BAF 301D

    Details
    ID#:
    70883
    Category:
    Etchers / Ashers
    Freeze-etching system for TEM sample preparation, with 19" tall x 15" wide vacuum chamber with tapered rear wall. 18" deep at bottom & 13" deep at top, with full opening O-ring sealed hinged door with 6" ID viewport. The chamber has additional KF and ISO ports. The pumping system consists of a Balzers Dif 900 diff pump and a MCG 900 combo LN2 trap with a rated pumping speed of 450 l/s at the inlet of the baffle. Electropneumatic valves are used throughout and a Duo 30A 26.5 cfm two-stage direct drive roughing pump is also included. Sample temperature is controlled by a Balzers GA1 freeze etching control unit from -150 to +50ºC with LN2 required for cooling. Additionally, a filament transformer with output of 4, 8 & 16 volts for carbon evaporation and a Balzers QSG 201 film thickness monitor with QSK113 crystal holder. A vacuum system controller is not provided.
  • UNAXIS / BALZERS: LLS 502

    Details
    ID#:
    112177
    Category:
    Sputtering Systems
    Wafer Size:
    4" 
    Sputtering systems, 4" | | Specifications: | | Main body: | Model: Balzers LLS 502, 3x400/230V 50/60Hz | (2) CT8F cryo pumps | (1) DU0030 Lotary pump | | Substrate holder: | 3 type of Balzers substrates can be used: | 4" dia X 0.5mmt | 4" dia X 1.2mmt | 4" dia X 2.0mmt | | Gas box: | For Sputter, 1 x MFC: Ar. 500 sccm | For Etching, 2 x MFC: Ar. 20/50 sccm | For Slow Vent, 1 x MFC: N2. 5000 sccm | | DC-PM cathode: | Model: (5) Balzers AK515 | Cathode Length : 5" x 15" | Stack sputter | | DC Cathode power: | Model: Advanced Energy MDC 5KX | Maximum Power : 5KW | | (4) Magnet systems: | (3) Balzers MB 515 For Cu. Cr. Ti. | (1) Balzers MC 515 For PamaAroi, Ni80/Fe20 | | Substrate Heating Heaters: | Balzers MCC Ni50/Fe50 | For Load Block chamber: | Quartz Ramp Heater | Heater Capacity : 2 KW | Maximum Temperature : 200 Degree | For Process chamber : | Quartz Ramp Heater | Heater Capacity : 4 KW | Maximum Temperature : 400 Degree | | Ion Beam Etching System For Load Lock chamber: | Model: Inotech Linia Ion gun | Length : 6.0 x 30.0cm | Acceleration Voltage : 0-1000 V | Beam Current : 300mA | Ar Gas flow : 10 sccm | Working distance : 28 / 29cm | Cooling Method | Power : MPS500IPBN | New Driver | | Chamber Cover: Balzers stainless steel | | Transformer trance: Yamamitu Denki | 1st : 3 layers 200V 3phases | 2nd : 3 layers 400/230V 5phases | Capacity : 40KVA | Length : about 700W x 700D x 780H | | Target material: | Length : 5" x 15" | Material : Ti, Cu, Cr, FeNi | | Chiller unit: Miura Zimusyo | | Maintenance hoist: Balzers | | DC Bias: Above 150V | | Poli code: PFC 400 | Power : 3 layers 200V 3Ph 16A | Capacity : 3.2 KVA | cooling Water : 3.8 lpm / 18 degree | (1) DC pulsed, 5KW | (1) RF, 3KW | | Currently de-installed and warehoused | Decommissioned in 2007 | Can be inspected | 1995-1996 vintage.
  • LEYBOLD: WSU501 D40BCS

    Details
    ID#:
    175084
    Category:
    Pumps
    PFPE prepper blower package for Leybold pumps, P/N 8000082378010.
  • BALZERS: HLT 160

    Details
    ID#:
    9014787
    Category:
    Leak Detectors
    Portable helium leak detectors | 1 test port free of oil back-streaming | Auto-ranging and autocalibration | No LN2 required | Remote keypad control | Transport cart with backing pump | Sensitivity to 2×10-11 mbar 1/s | BG Z04 750/690 | 110 V, 60 Hz, 600 VA | | Includes Balzers DUO-016B pump, 110 V.
  • BALZERS: BAK 760

    Details
    ID#:
    9038361
    Category:
    Evaporators
    Evaporator | | Includes: | BPU 431 | TPG 300 | RVG 040 | RME 010 | Valve PVA 500 P2 | IMG 300 Ion gauge control | E-Beam control EEC420 | Valve drawer VAT DN 63 | Valve RVE010 | Diffusion pump | Polycold | Gun | | Specifications: | IKG >10-3<10-9 mbar | Roots WKP500A 440 M3/H | Diff. 500A: 11500 l/s | Cap. heater: 6 kW | Trap nitrogen BFA 500: 9000 l/s | Polycold PFG 650-11st: -100º/-140º C | Pump Leybold Trivac D65B: 65 m3 | Gauge 010 IKR: 10-3 to 10-8 mbar | Primary gauge: Tpr 10: < 10-3 mbar | Head quartz crystal QSK521A: 6 quartz | EHV Power supply: 18 215 HT: 15.6 kW | ECS Coil power supply: +/- 2.5 A | EFS 200 Filament power supply: 60 A | Electron gun ESQ212: 12 kW | Volume: 0.92 m3 | Flow (cold water): 6 l/mm | GVW: 2000 kg max | Air pressure: 5-8 bar | Compressor: -25º C | Electrical voltage: 380 V.
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